Design of an integrated temperature and humidity sensor based on high dynamic range utilization rate ADC

An integrated sensor for temperature (Temp) and humidity (RH) measurement is designed. The (T/H) sensing probe are combined with one first-order discrete-time Σ-∆ analog-to-digital converter (ADC). Also, a new ample architecture of ADC proposed, selects reasonable reference voltage according to varied range T/H signals. Therefore, the dynamic utilization rate improved. proposed designed fabricated in 0.153μm CMOS technology. experimental results show that achieves −0.9∼0.6% RH accuracy 10∼90% RH, ±0.4℃ −40∼120℃.